Manufacturing System

FACILITY

Capital Investment in Advanced Technologies

Our Products

Marumae manufactures components that serve as the core units of semiconductor and flat panel display manufacturing equipment.

Major Processes in Which Customers Use Our Products

  • Etching
  • CVD
  • Coater/developers
  • Sputtering
  • Single wafer cleaning
  • Ashing
  • Wafer bonding
  • Ion implantation
  • Annealing

Our Main Products

  • Vacuum chambers
  • Shower heads
  • Exhaust plates
  • Electrostatic chucks
  • Heaters
  • Upper electrodes
  • Targets
  • Parts for transfer systems
  • Other vacuum components

Locations

Headquarters and Izumi Factory / 72,330 m2
High-precision components for equipment to manufacture semiconductors
Takanono Factory / 16,710 m2
High-precision components for equipment to manufacture semiconductors and flat panel displays
Kanto Factory / 1,516 m2
High-precision components for equipment to manufacture semiconductors

Main Facilities

Automated Production Line

We employ an automated system featuring storage, robots, lathes, machining centers, and other machine tools. Going forward, we aim to realize a 24/7 fully automated production system. We chiefly engage in the manufacture of vacuum components in the field of semiconductors, a sector with strong demand for repeat orders.

Electron Beam Welding (EBW) Equipment

EBW is a process with high accuracy and reproducibility for welding aluminum, stainless steel, and other metals using electron beam radiation accelerated by electromagnets in a vacuum. This equipment can be used to produce vacuum components with cooling paths for semiconductor production equipment (SPE). Our EBW equipment can process components up to about 700 mm in diameter in the field of semiconductors. We can also create products at sizes of more than 3 meters using EBW.

Double-column 5-face Milling Machines

A table size of 3.5 ｍ x 6 m allows for machining from multiple angles without moving the workpiece. This equipment is mainly used to produce vacuum chambers and other core components for flat panel display manufacturing equipment. We use a total of 13 double-column 5-face and double-column milling machines as well as 3 gun-drill machines.

Intelligent Multitasking Machines

Intelligent Multitasking Machines combine the process of lathing to remove the round part with the process of 5-axis milling from every direction simultaneously (cutting using the rotary tool). Thus, a product can be set once to perform complex, highly precise, and highly efficient machining. This equipment is mainly used to produce vacuum components for SPE. We produce a wide range of products using over 100 machines of different sizes, including 10 simultaneous 5-axis milling machines.